Microelectromechanical optical switch and method o

专利名称：Microelectromechanical optical switch and

method of manufacture thereof

发明人：Nan Zhang申请号：US09789887申请日：20010221

公开号：US20010008457A1公开日：20010719

摘要：A MEMS-based optical switch having improved characteristics and methods formanufacturing the same are provided. In accordance with one embodiment, an opticalswitch includes a single comb drive actuator having a deflecting beam structure and amirror coupled to the actuator. The mirror is capable of being moved between anextended position interposed between waveguide channels and a retracted positionapart from the waveguide channels. The actuator applies a force capable of deflectingthe beam structure and moving the mirror to one of the extended positions or theretracted position and the beam structure returns the mirror to the other of theextended position or the retracted position in the absence of the application of force.

申请人：ADC TELECOMMUNICATIONS, INC.

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