专利名称：FILM MEASUREMENT
发明人：Edward W. BUDIARTO,Todd J. EGAN,Dmitry
A. DZILNO
申请号：US13662330申请日：20121026
公开号：US20140117982A1公开日：20140501
专利附图：
摘要：In one embodiment, a sample is tested by an eddy current sensor at twodistances separated by a known incremental distance. In one aspect, at least one of anunknown distance of the sensor from the test sample and the film thickness of the test
sample may be determined as a function of a comparison of sensor output levels of asingle parameter and the known incremental distance to calibration data. In yet anotheraspect, the distance between the sensor and the test sample may oscillated to producean oscillating sensor output signal having an amplitude and mean which may be measuredand compared to calibration data to identify at least one of the unknown film thicknessof a conductive film on a test sample, and the unknown distance of the test sample fromthe sensor. Other aspects and features are also described.
申请人：APPLIED MATERIALS, INC.
地址：Santa Clara CA US
国籍：US
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容