专利名称：Optical measurement apparatus发明人：Ronald Vern Schauer申请号：US10033714申请日：20011228公开号：US07112812B2公开日：20060926
专利附图：
摘要：An apparatus, system and method for measuring a feature of a three-dimensional object, such as a wafer carrier, are provided. The apparatus is for use with anoptical scanner and comprises a mounting structure adapted to be disposed on thescanner. The mounting structure has a calibration mark adapted to be read by the
scanner and is adapted to position the object so that it is at a first pre-determineddistance from the calibration mark. In one aspect of the present invention, the mountingstructure further comprises an alignment surface adapted to abut the object. Thealignment surface is disposed at a second pre-determined distance from the calibrationmark. In another aspect of the present invention, the alignment surface is adapted toabut the object at a point spaced apart from the scanning surface.
申请人：Ronald Vern Schauer
地址：Gilroy CA US
国籍：US
代理机构：Konrad Raynes Victor & Mann, LLP
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