专利名称：DEVICE AND METHOD FOR SENSOR
CALIBRATION
发明人：TESKEY, Wesley James Emmanouel,TEA, Nim
Hak
申请号：EP15823293.4申请日：20151219公开号：EP3233716A1公开日：20171025
摘要：A device and method for a MEMS device with at least one sensor is disclosed. Athermal element is disposed adjacent the MEMS device to selectively adjust atemperature of the MEMS device. A calibration operation is initiated for the sensor todetermine a correction value to be applied to the sensor measurement based on thetemperature. The correction value is stored.
申请人：InvenSense, Inc.
地址：1745 Technology Drive San Jose, CA 95110 US
国籍：US
代理机构：Kenyon, Sarah Elizabeth
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