专利名称：DEVICE FOR PRODUCING EXCITED AND/OR
IONISED PARTICLES IN A PLASMA ANDMETHOD FOR PRODUCING IONISEDPARTICLES
发明人：GSCHWANDTNER, ALEXANDER,MATHUNI,
JOSEF,MATTHEUS, ALEXANDER,SCHNEIDER,STEPHAN,SELLMAIER,
JUERGEN,STEINHARDT, HEINZ
申请号：EP04765827.3申请日：20041005公开号：EP1709663A2公开日：20061011
摘要：The invention relates to a device for producing excited and/ or ionised particlesin a plasma, comprising a generator (11) which is used to produce an electromagneticwave and an excitation chamber (20) comprising a plasma area wherein the excited and/orionised particles are formed. At least one stimulation chamber is arranged in an insulatingmaterial (18) in an off-centre position in relation to an annular-cylindrical outer conductor(17).
申请人：R3T GMBH
地址：Rapid Reactive Radicals Technology Hochstr. 1 82024 Taufkirchen DE
国籍：DE
代理机构：Lang, Friedrich
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