专利名称：MULTI-LAYER SUBSTRATE MEASUREMENT
METHOD, MULTI-LAYER SUBSTRATE, ANDMEASUREMENT DEVICE
发明人：YAMAMOTO Taiki,YAMAMOTO
Taketsugu,KASAHARA Kenji
申请号：EP16772666.0申请日：20160325公开号：EP3279640A1公开日：20180207
专利附图：
摘要：A measurement method for a laminate substrate is provided. The laminate
substrate has: a base substrate; an absorption layer; and a measurement-target layer inthis order. The measurement-target layer has a single measurement-target monolayeror a plurality of measurement-target monolayers. The method includes: emitting incidentlight including light with a wavelength shorter than a threshold wavelength from a sideon which the measurement-target layer is positioned, and measuring reflected light andacquiring mutually independent 2n (n is a layer count of the measurement-targetmonolayers included in the measurement-target layer and is an integer equal to one orlarger) or more reflected light-related values for wavelengths equal to the thresholdwavelength or shorter; and calculating values related to the measurement-targetmonolayers for each measurement-target monolayer included in the measurement-target layer using the 2n or more reflected light-related values.
申请人：Sumitomo Chemical Company, Ltd.
地址：27-1, Shinkawa 2-chome Chuo-ku Tokyo 104-8260 JP
国籍：JP
代理机构：Vossius & Partner Patentanwälte Rechtsanwälte mbB
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