专利名称:Mini-environment control system and
method
发明人:Roland Bernard,Eric Chevalier申请号:US09729779申请日:20001206公开号:US06422823B1公开日:20020723
专利附图:
摘要:A mini-environment control device includes an individual enclosure to contain asample and to isolate it from the external environment. An array of micropumps attachedto the individual enclosure generates and maintains a controlled vacuum in the individual
enclosure. Transfer means introduce the sample into the individual enclosure and extractit therefrom. The micropumps of the array of micropumps can be of a type employingthe thermal transpiration effect. Temperature and pressure microsensors and a gasanalyzer enable the operation of the array of micropumps to be controlled by anonboard microcomputer. The atmosphere surrounding a sample is therefore controlled.
代理机构:Sughrue Mion, PLLC
更多信息请下载全文后查看
因篇幅问题不能全部显示,请点此查看更多更全内容