专利名称：Method of making transducer发明人：John C. Greenwood申请号：US06/124781申请日：19800226公开号：US04293373A公开日：19811006
摘要：A silicon transducer including a silicon frame with one or more lands extendingfrom a diaphragm or the like. The lands are interconnected by two thin strips formedintegrally with the lands. The strips are essentially the transducer. The transducer isconstructed by etching a boron doped wafer with a mixture of catechol, ethylene diamineand water.
申请人：INTERNATIONAL STANDARD ELECTRIC CORPORATION
代理人：A. Donald Stolzy
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