Low-frequency modulated current mode power supply

专利名称：Low-frequency modulated current mode

power supply for magnetron sputteringcathodes

发明人：Dmitri Kowalevskii,Michael Kishinevsky申请号：US08/664129申请日：19960614公开号：US05777863A公开日：19980707

摘要：A power supply for driving two magnetron sputtering devices in a bipolar modeincludes current pulse circuits one for driving each of the two magnetrons. Each of thecurrent pulse circuits converts positive and negative voltage outputs of a DC electricalpower source to a train of regulated current pulses of independently adjustableduration. Each of the current pulse circuits includes a circuit block for converting the DCoutput voltage to a source of regulated current and delivering that regulated current toan input end of an inductor. Each of the current pulse circuits also includes an outputswitching circuit block which periodically and alternatively switches an output terminalbetween an output end of the inductor and the positive voltage output of the DC powersource. The power supply may be configured to drive one magnetron in a unipolar modealone or as an alternative to driving two magnetrons in a bipolar mode. A current pulsecircuit may be used independently to provide a current pulse train from a DC voltagesource for driving a device other than a magnetron. The current converting andregulating circuit block may be used independently for providing a regulated currentsource from a DC voltage source.

申请人：PHOTRAN CORPORATION

代理人：R. Russel Austin

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