专利名称：Method for manufacturing electrical
contacts for a thin-film semiconductordevice
发明人：David E. Carlson,Charles R. Dickson,Robert V.
D'Aiello
申请号：US07/068753申请日：19870629公开号：US04783421A公开日：19881108
摘要：A method of fabricating spaced-apart back contacts on a thin film of
semiconductor material by forming strips of buffer material on top of the semiconductormaterial in locations corresponding to the desired dividing lines between back contacts,forming a film of metal substantially covering the semiconductor material and bufferstrips, and scribing portions of the metal film overlying the buffer strips with a laserwithout contacting the underlying semiconductor material to separate the metal layerinto a plurality of back contacts. The buffer material serves to protect the underlyingsemiconductor material from being damaged during the laser scribing. Back contacts andmulti-cell photovoltaic modules incorporating such back contacts also are disclosed.
申请人：SOLAREX CORPORATION
代理机构：Finnegan, Henderson, Farabow, Garrett & Dunner
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