专利名称：Measurement apparatus and measurement
method
发明人：Nishikawa, Yuya,Kuramoto,
Yoshiyuki,Nakauchi, Akihiro
申请号：EP13199527.6申请日：20131224公开号：EP2749840A1公开日：20140702
专利附图：
摘要：The present invention provides a measurement apparatus for measuring ashape of an object to be measured, comprising a measuring head (1) configured to
perform measurement in a first measurement mode and perform measurement in asecond measurement mode having measurement accuracy higher than that of the firstmeasurement mode, and a control unit (20) configured to control the measuring head,wherein in the first measurement mode, the control unit moves the measuring headoutside an occupancy region within which the object to be measured should fall while theobject to be measured falls within the occupancy region, and in the second measurementmode, the control unit moves, the measuring head to satisfy an allowable condition in thesecond measurement mode based on a measurement result in the first measurementmode.
申请人：CANON KABUSHIKI KAISHA
地址：30-2, Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
国籍：JP
代理机构：Northway, Daniel Robert
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