专利名称：MEMS BASED RF COMPONENTS WITH
VERTICAL MOTION AND PARALLEL-PLATESTRUCTURE AND MANUFACTURE THEREOFUSING STANDARD CMOS TECHNOLOGIES
发明人：Fouladi Azarnaminy Siamak,Maher Bakri-Kassem,Mansour Raafat R.
申请号：US12131890申请日：20080602
公开号：US20090296307A1公开日：20091203
专利附图：
摘要：A process of manufacturing parallel-plate microstructures by integrating themicrostructures in a chip using a CMOS process is provided. A MEMS variable capacitor, atunable band-pass filter, tunable matching networks, and capacitive RF-MEME switches allhaving vertically movable components and are integrated into a chip.
申请人：Fouladi Azarnaminy Siamak,Maher Bakri-Kassem,Mansour Raafat R.
地址：Waterloo CA,Cary NC US,Waterloo CA
国籍：CA,US,CA
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